PRODUCT01
More than 100 units are in operation at semiconductor industry Fabs and QA labs around the world.
This is an innovative pretreatment system connected with ICP-MS to achieve fully automated analysis of metal impurities in Si wafers and others. PS, FAB and LAB models are available and they can also be custom-made to meet your specific purpose.
PRODUCT02
The new LA-ICP-MS system that could overcome two major issues on the conventional LA-IC-MS systems.
■Direct Analysis without Cutting Wafers
The conventional LA-ICP-MS system needs to use a small enclosed cell in which a small solid sample is placed.
LAGM doesn’t require the small enclosed cell. A solid sample is laser ablated under particle free environment, and generated particles are aspirated together with clean air by an ejector, which are introduced to the plasma of ICP-MS via GED (Gas Exchange Device).
■Superior Quantitation Capability
Another issue of the conventional LA-ICP-MS is the quantitation. Solid standard reference materials (SRMs) are commonly used, but the particle amount generated from a solid sample and the SRMs would be different, which makes difficult to perform accurate quantitation.
LAGM uses the MSAG_DS that injects a few μL/min of mixed standard solution that are vaporized and introduced to the plasma of ICP-MS almost 100%. As a result, the method of standard addition or internal standard can be used while laser ablating a solid sample, which allows accurate quantitation.
PRODUCT03
This is a system that automatically and continuously monitors metallic impurities in chemical solutions at ppt levels at even long-distance sampling points without any human intervention.
PRODUCT04
This system automatically adds standard solutions online for ICP-MS analysis, and is applicable to both the external calibration method and the method of standard addition.
PRODUCT05
Dilution of chemical solution is needed to avoid damage on ICP-MS cones. ASDM dilutes chemicals by 2 –1,000 times, and the diluted chemical can be analyzed by the method of standard addition with ASAS II automatically.
PRODUCT06
This is an introduction system that enables direct introduction of gas samples into ICP-MS, for its direct analysis of their metallic particles.
PRODUCT07
This system is capable of introducing a very small amount of standard solution into ICP-MS plasma with 100% efficiency.
It is ideal for the determination of impurities in gas samples and the measurement of particle size distribution of particulate metals.
Company name | IAS Inc. |
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Established | December/9/2004 |
Capital | 90 million yen |
President | Katsuhiko Kawabata |
Head office | 2-2-1 Hinohonmachi, Hino, Tokyo 191-0011, Japan |
TEL | +81-42-589-5525 |
Business details | Manufacture and sales of ICP-OES/ICP-MS parts, peripherals, and pretreatment devices, etc. |